{"id":2898,"date":"2024-07-04T11:18:00","date_gmt":"2024-07-04T09:18:00","guid":{"rendered":"https:\/\/gbs-ilmenau-staging.seiten.co\/?post_type=blog&p=2898"},"modified":"2025-10-29T14:01:12","modified_gmt":"2025-10-29T13:01:12","slug":"gbs-accelerates-wafer-measurements","status":"publish","type":"blog","link":"https:\/\/gbs-metrology.com\/en\/blog\/gbs-accelerates-wafer-measurements\/","title":{"rendered":"GBS accelerates wafer measurements"},"content":{"rendered":"
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GBS accelerates wafer measurements<\/h1>\r\n
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GBS, a leading company in optical 3D sensors based on coherence scanning (white-light) interferometry, now offers complete wafer measurement systems configured for use under cleanroom conditions.<\/strong>
10GigE cameras and real-time processing on state-of-the-art GPGPUs (General Purpose Graphic Processing Units) \u2014 delivering computing power equivalent to approximately 100 Core i9 PCs \u2014 significantly accelerate the measurement process. As a result, users can scan more wafers, more positions per wafer, and larger areas compared to alternative sensors. The Speedytec\u00ae-enabled system software allows for fully automated measurement and evaluation processes \u2014 saving both time and money.<\/p>\n

Standard granite gantries are available for wafers up to 300 mm in diameter.<\/strong>
Compatible sensors such as the smartWLI dual<\/strong>, smartWLI next<\/strong>, smartWLI compact<\/strong>, smartWLI firebolt<\/strong>, and smartWLI nanoscan<\/strong> are equipped with high-speed cameras supporting frame rates up to 935 Hz<\/strong> and point resolutions up to 5 megapixels<\/strong>, delivering topography reproducibility down to 0.03 nm<\/strong> in single scans with spatial sampling as fine as 0.03 \u00b5m<\/strong>. The motorized Z-axis allows for height compensation up to 50 mm<\/strong>. The systems are optionally available with automatic tilt correction<\/strong> and customizable light sources<\/strong> for various applications.<\/p>\n

System integrators<\/strong> can incorporate the sensors into their own measurement setups. The SDK<\/strong> provides access to all necessary sensor functions. The high-performance sensor components, combined with the Speedytec\u00ae engine<\/strong>, enhance overall system performance through faster measurements and a significant reduction in the effects of suboptimal environmental conditions, such as vibrations<\/strong> and thermal drift<\/strong>.<\/p>\n <\/div>\r\n <\/div>\r\n <\/div>\r\n <\/div>\r\n

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