Equipped with a nosepiece and a high-resolution, fast 10-GigE camera, the sensor offers outstanding perfor-mance for universal measuring stations and optical 3D profilometers used in research facilities for demanding measurement tasks.

The smartWLI next combines the high resolution of a piezo scanner with the advantages of a motorized objective turret.
The sensor can be equipped with one of three different cameras, offering various speed and resolution options.

Various stands, granite gantries, vibration damping systems, and automated tilt stages allow the configuration of custom optical 3D profilers, with the smartWLI next serving as the key component for high-performance measurements.

The SDK, including C++ and C# libraries and source code for sample applications, enables easy integration of the sensor into high-end metrology systems for semiconductor and optics applications.

The manual turret simplifies operation of the fast optical 3D sensor. The 400 µm piezo actuator enables measurement of extremely smooth surfaces. The turret allows for easy localization of small features using low-magnification objectives and instant switching to a different objective for measurement.

A wide range of different stands and granite portals allows GBS optical 3D profilers to be configured to meet specific requirements. Alternatively, the SDK—including C++ and C# libraries as well as source code for sample applications—can be used to integrate the sensor into custom measurement stations.

The extreme speed of the 10GigE camera allows the measuring of nanostructures without anti-vibration systems in production environments.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI firebolt as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

Using a high resolution and fast 10GigE camera the sensor delivers 8 million measuring point in a fast single scan.
The sensor offers decisive advantages, especially when a larger area needs to be measured quickly and with high resolution.

The sensor combines compact dimensions with an excellent resolution and an affordable price. Available with 2 different cameras and a single, manual exchangeable objective make the sensor a good choice for repeated measurements of similar samples and measuring tasks which require similar lateral resolutions.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI compact as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

The smartWLI nanoscan is equipped with a higher tube magnification blue LED illumination and a 5 MP camera. This enables the sensor to measure structures with a lateral dimension down to app. 0.4 µm with a spatial sampling down to 0.03 µm.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI nanoscan as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

The sensor is the entry level model into the smartWLI product family. The integrated 5 mm axis can be used for automated fast focusing with range detection and automated measurements. This saves time and simplifies the sensor integration into production lines.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.