bool(false)

Step Height Standard

Our step height standards are used for the precise calibration of the vertical measuring accuracy of your 3D surface measuring devices. With defined height differences, they enable reliable checking and adjustment of the Z-axis, thus ensuring consistent and reproducible measurement results in your quality control.

Produktbild Kalbirierstandard step-high-standards
TYP silicon chip
nominal step height: steps 230nm, 450nm, 20µm, 100µm, 200µm
Mounting better handling the standards are mounted on borosilicate glass with a size of 5 cm x 5 cm
factory calibration certificate factory calibration certificate included

Step Height Standard

Vertical calibration, height check, Z-axis
Accessories Example configuration:
silicon chip
nominal step height: steps 230nm, 450nm, 20µm, 100µm, 200µm
better handling the standards are mounted on borosilicate glass with a size of 5 cm x 5 cm
factory calibration certificate included

UCS-1 Universal Confirmation Standard

Multifunctional 3D calibration standard, system verification
Accessories Example configuration:
diamond turning, massive steel substrate, hardened surface for easy cleaning
step height area: steps 1, 2, 5, 10, 20, 50 µm
sinus area: length 8 mm, amplitude 0.5 µm wavelength 200 µm, roughness 0.16 µm Ra
flat area: length 8 mm, roughness Ra app. 2 nm
Discover our services

Other accessory categories

Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.

Produktfoto Zubehörteil: Granitprofil

Stands & granite portals

A reliable mechanical foundation is essential for high-precision measurement results. Our stands and granite portals offer maximum stability, vibration damping, and durability—ideal for use with 3D surface measurement systems in laboratory and production environments.

Produktfoto Interferenzobjektiv 100x

Objective lenses

Choosing the right lens is essential for the quality and significance of your measurement results. Our range includes specially designed lenses for different magnification ranges, working distances, and resolutions. This allows you to flexibly adapt your 3D measurement systems to a wide variety of requirements.

Produktfoto Kalibrierstandard

Calibration standards

Regular calibration is essential to ensure long-term measurement accuracy. Our calibration standards are traceable and comply with international standards. They are ideal for system control, quality assurance, and validation of your measurement processes.

Vibration isolation

Even slight vibrations can negatively affect high-precision 3D measurements. Our vibration isolation systems reliably minimize mechanical disturbances—whether caused by machines, building vibrations, or environmental influences. This ensures stable and reproducible measurement results even in sensitive environments.

Numbers that convince

Why GBS?

We measure, analyze, and visualize technical surfaces in 3D – from tool steel to semiconductor wafers. Precise. Comparable. Reproducible.

In-house product development

100 % made in Germany.

Nano precision

Measurement resolution below 1 nm.

Ready for integration

Interfaces for every production line.

bool(false)

Calibration Standard for Flatness –

Planarity, flatness testing, surface calibration

Our flatness standards enable you to calibrate and test the planarity and flatness of your measuring systems to the highest standards. These standards are ideal for detecting and correcting system-related deviations and make a decisive contribution to increasing measuring accuracy across the entire measuring surface.

Produktfoto Kalibrierstandard für Flachheit
TYP Al surface mirror
Area of application target for 2.5x – 115x objective
Diameter 50 mm
Flatness λ / 20

Step Height Standard

Vertical calibration, height check, Z-axis
Accessories Example configuration:
silicon chip
nominal step height: steps 230nm, 450nm, 20µm, 100µm, 200µm
better handling the standards are mounted on borosilicate glass with a size of 5 cm x 5 cm
factory calibration certificate included

UCS-1 Universal Confirmation Standard

Multifunctional 3D calibration standard, system verification
Accessories Example configuration:
diamond turning, massive steel substrate, hardened surface for easy cleaning
step height area: steps 1, 2, 5, 10, 20, 50 µm
sinus area: length 8 mm, amplitude 0.5 µm wavelength 200 µm, roughness 0.16 µm Ra
flat area: length 8 mm, roughness Ra app. 2 nm
Discover our services

Other accessory categories

Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.

Produktfoto Zubehörteil: Granitprofil

Stands & granite portals

A reliable mechanical foundation is essential for high-precision measurement results. Our stands and granite portals offer maximum stability, vibration damping, and durability—ideal for use with 3D surface measurement systems in laboratory and production environments.

Produktfoto Interferenzobjektiv 100x

Objective lenses

Choosing the right lens is essential for the quality and significance of your measurement results. Our range includes specially designed lenses for different magnification ranges, working distances, and resolutions. This allows you to flexibly adapt your 3D measurement systems to a wide variety of requirements.

Produktfoto Kalibrierstandard

Calibration standards

Regular calibration is essential to ensure long-term measurement accuracy. Our calibration standards are traceable and comply with international standards. They are ideal for system control, quality assurance, and validation of your measurement processes.

Vibration isolation

Even slight vibrations can negatively affect high-precision 3D measurements. Our vibration isolation systems reliably minimize mechanical disturbances—whether caused by machines, building vibrations, or environmental influences. This ensures stable and reproducible measurement results even in sensitive environments.

Numbers that convince

Why GBS?

We measure, analyze, and visualize technical surfaces in 3D – from tool steel to semiconductor wafers. Precise. Comparable. Reproducible.

In-house product development

100 % made in Germany.

Nano precision

Measurement resolution below 1 nm.

Ready for integration

Interfaces for every production line.

bool(false)

UCS-1 Universal Confirmation Standard –

Multifunctional 3D calibration standard, system verification

The UCS-1 is a versatile calibration standard for comprehensive verification of 3D measuring systems. With a combination of defined structures, heights, and geometries, it allows simultaneous testing of various measurement parameters and is ideal for system acceptance, maintenance, and comparison of different devices.

TYP diamond turning, massive steel substrate, hardened surface for easy cleaning
Step height area 1, 2, 5, 10, 20, 50 µm
Sinus area length 8 mm, amplitude 0.5 µm wavelength 200 µm, roughness 0.16 µm Ra
flat area length 8 mm, roughness Ra app. 2 nm

Step Height Standard

Vertical calibration, height check, Z-axis
Accessories Example configuration:
silicon chip
nominal step height: steps 230nm, 450nm, 20µm, 100µm, 200µm
better handling the standards are mounted on borosilicate glass with a size of 5 cm x 5 cm
factory calibration certificate included

UCS-1 Universal Confirmation Standard

Multifunctional 3D calibration standard, system verification
Accessories Example configuration:
diamond turning, massive steel substrate, hardened surface for easy cleaning
step height area: steps 1, 2, 5, 10, 20, 50 µm
sinus area: length 8 mm, amplitude 0.5 µm wavelength 200 µm, roughness 0.16 µm Ra
flat area: length 8 mm, roughness Ra app. 2 nm
Discover our services

Other accessory categories

Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.

Produktfoto Zubehörteil: Granitprofil

Stands & granite portals

A reliable mechanical foundation is essential for high-precision measurement results. Our stands and granite portals offer maximum stability, vibration damping, and durability—ideal for use with 3D surface measurement systems in laboratory and production environments.

Produktfoto Interferenzobjektiv 100x

Objective lenses

Choosing the right lens is essential for the quality and significance of your measurement results. Our range includes specially designed lenses for different magnification ranges, working distances, and resolutions. This allows you to flexibly adapt your 3D measurement systems to a wide variety of requirements.

Produktfoto Kalibrierstandard

Calibration standards

Regular calibration is essential to ensure long-term measurement accuracy. Our calibration standards are traceable and comply with international standards. They are ideal for system control, quality assurance, and validation of your measurement processes.

Vibration isolation

Even slight vibrations can negatively affect high-precision 3D measurements. Our vibration isolation systems reliably minimize mechanical disturbances—whether caused by machines, building vibrations, or environmental influences. This ensures stable and reproducible measurement results even in sensitive environments.

Numbers that convince

Why GBS?

We measure, analyze, and visualize technical surfaces in 3D – from tool steel to semiconductor wafers. Precise. Comparable. Reproducible.

In-house product development

100 % made in Germany.

Nano precision

Measurement resolution below 1 nm.

Ready for integration

Interfaces for every production line.

bool(false)

Lateral calibration standard –

XY calibration, measuring surface inspection

The lateral calibration standard is used to precisely determine and calibrate the pixel spacing of your 3D surface measurement system. This ensures that the lateral image corresponds exactly to the physical dimensions of the measurement surface. It is essential for the correct scaling of the measurement data in the X and Y directions and ensures the accuracy of the lateral dimensions across the entire image field size.

Produktbild lateraler Kalibrierstandard
TYP dot matrix / chrome on glass
Objective target for 2.5x – 115x objective
Diameter 5-60µm
Pitch 10-120µm

Step Height Standard

Vertical calibration, height check, Z-axis
Accessories Example configuration:
silicon chip
nominal step height: steps 230nm, 450nm, 20µm, 100µm, 200µm
better handling the standards are mounted on borosilicate glass with a size of 5 cm x 5 cm
factory calibration certificate included

UCS-1 Universal Confirmation Standard

Multifunctional 3D calibration standard, system verification
Accessories Example configuration:
diamond turning, massive steel substrate, hardened surface for easy cleaning
step height area: steps 1, 2, 5, 10, 20, 50 µm
sinus area: length 8 mm, amplitude 0.5 µm wavelength 200 µm, roughness 0.16 µm Ra
flat area: length 8 mm, roughness Ra app. 2 nm
Discover our services

Other accessory categories

Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.

Produktfoto Zubehörteil: Granitprofil

Stands & granite portals

A reliable mechanical foundation is essential for high-precision measurement results. Our stands and granite portals offer maximum stability, vibration damping, and durability—ideal for use with 3D surface measurement systems in laboratory and production environments.

Produktfoto Interferenzobjektiv 100x

Objective lenses

Choosing the right lens is essential for the quality and significance of your measurement results. Our range includes specially designed lenses for different magnification ranges, working distances, and resolutions. This allows you to flexibly adapt your 3D measurement systems to a wide variety of requirements.

Produktfoto Kalibrierstandard

Calibration standards

Regular calibration is essential to ensure long-term measurement accuracy. Our calibration standards are traceable and comply with international standards. They are ideal for system control, quality assurance, and validation of your measurement processes.

Vibration isolation

Even slight vibrations can negatively affect high-precision 3D measurements. Our vibration isolation systems reliably minimize mechanical disturbances—whether caused by machines, building vibrations, or environmental influences. This ensures stable and reproducible measurement results even in sensitive environments.

Numbers that convince

Why GBS?

We measure, analyze, and visualize technical surfaces in 3D – from tool steel to semiconductor wafers. Precise. Comparable. Reproducible.

In-house product development

100 % made in Germany.

Nano precision

Measurement resolution below 1 nm.

Ready for integration

Interfaces for every production line.