smartWLI nimbus8 –
high-speed, extreme resolution sensor
Equipped with a nosepiece and a high-resolution, fast 10-GigE camera, the sensor offers outstanding perfor-mance for universal measuring stations and optical 3D profilometers used in research facilities for demanding measurement tasks.
| measuring principle | coherence scanning (white-light) interferometer |
| high-speed and resolution camera | 3488 x 2192 pixel / 160 fps 10GigE camera / optional decimation, binning and AOI |
| optical 3D sensor | high performance sensor with motorized objective turret for up to 4 objectives |
| scanning device | piezo positioning system / close loop capacity gauge control 200µm scanning range / 30nm linearity |
| high speed measurements | real time image processing on advanced graphic boards |
| general evaluation algorithms | HD-EPSI with combined: VSI (vertical scanning interferometry / localization of the interference maxima with unlimited scanning range) PSI (phase shift interferometry for extreme height resolution) |
| fast and effective noise reduction | extreme small increments allows fast and effective noise reduction for single scans and can be combined with time consuming averaging processes using multiple scans |
| extreme lateral resolution | unlimited evaluation from up to 8 MP measuring points without range and resolution limitation (except accelerated measurements using decimation, binning and AOI) |
| increased acceptance angles | image corrections and contrast enhancement allows the detection of weak signals and the measurement of steep geometries on shine objects |
| outliner free scanning processes | AQC (advanced quality control) compares the interference signal of each measuring point with an ideal signal and eliminate outliner without matrix filters |
Materials for download
You can download a single file or multiple files. Please select one or more files to download.
more from GBS
Recommended products
smartWLI next
high end sensor with motorized objective turret
Accessories Example configuration:
Scan/Focus axis (50 mm, motorized)
XY positioning stage (100 × 100 mm², motorized)
Tilt table (manually operated)
Accessories Example configuration:
Scan/Focus Axis (70 mm, manually operated)
XY Positioning Table (100 × 100 mm², motorized)
Tilt Table (manually operated)
smartWLI firebolt
high speed sensor for production environments
Accessories Example configuration:
Scan/Focus axis (70 mm, manually operated)
XY positioning table (100 × 100 mm², motorized)
Tilt table (manually operated)
smartWLI firebolt8
high speed sensor for production environments
Accessories Example configuration:
Scan/Focus axis (70 mm, manually operated)
XY positioning table (100 × 100 mm², motorized)
Tilt table (manually operated)
Accessories Example configuration:
Scan/Focus axis (70 mm, manually operated)
XY positioning table (100 × 100 mm², motorized)
Tilt table (manually operated)
Accessories Example configuration:
Scan/Focus Axis (70 mm, manually operated)
XY Positioning Table (100 × 100 mm², manually operated)
Tilt Table (manually operated)
Accessories Example configuration:
Scan/Focus axis (70 mm, manually operated)
XY positioning table (100 × 100 mm², motorized)
Tilt table (manually operated)
Additional services
Discover our
accessory categories
Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.
