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Startseite - Products - smartWLI nanoscan

smartWLI nanoscan –

sensor with extreme resolution

The smartWLI nanoscan is equipped with a higher tube magnification blue LED illumination and a 5 MP camera. This enables the sensor to measure structures with a lateral dimension down to app. 0.4 µm with a spatial sampling down to 0.03 µm.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI nanoscan as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

optischer 3D Sensor	optical 3d sensor
objectives	Kohärenz-Scanning (Weißlicht) Interferometer
objective magnifications	Piezopositionier-System mit kapazitivem Sensor und Positionsregulierung 400μm Messbereich / 30nm Linearitätsabweichung
tube magnification	2456 x 2054 Pixel / 77 Hz und Beschleunigung bis zu 2 kHz bei eingeschränkter Messpunktanzahl
measuring principle	massiv parallele Verarbeitung der Bilddaten in Echtzeit Nutzung programmierbarer Hochleistungs-Grafikkarten
scanning device	Softwarebibliotheken in C++ und C# mit Beispielapplikation und zugehörigem Quellcode Ansteuerung aller Sensorfunktionen
topography reproducibility	VSI (Vertikal Scanning Interferometrie), EPSI (Extended Phase Shift Interferometrie) HD-EPSI (High Density – Extended Phase Shift Interferometrie) mit sehr kleinen Schrittweiten
repeatability RMS	optionale Mittelung über bis zu 40 Einzelmessungen zur Rauschunterdrückung
optional stands	variable Schrittweiten zur Optimierung von Auflösung und Messgeschwindigkeit
high speed camera	5 MP camera up to 2 kfps
point evaluation	massive parallel in real time on the GPGPUs
evaluation algorithms	VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) / HD (high density extended phase shift interferometry)

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Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.