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Startseite - Products - smartWLI firebolt

smartWLI firebolt –
high speed sensor for production environments

The extreme speed of the 10GigE camera allows the measuring of nanostructures without anti-vibration systems in production environments.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI firebolt as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

smartWLI firebolt

optical 3D sensor	optical 3D sensor
objective	single objective / manual exchangeable
objective magnification	2.5x – 115x
tube magnification	0.5x
measuring principle	coherence scanning (white-light) interferometer
scanning device	400 pm piezo stage with close loop capacity control
topography reproducibility	0.05 nm (single scan without profile averaging)
repeatability RMS	0.005 nm (single scan without profile averaging)
optional stands	manual and motorized stands
high speed camera	1.3 MP camera up to 10 kips
point evaluation	massive parallel in real time on the GPGPUs
evaluation algorithms	VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) / HD (high
density extended phase shift interferometry)

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accessory categories

Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.