Symposium on Laser Precision Microfabrication

In June 2020, GBS presented a new process for achieving “Super Resolution” at the Laser Precision Microfabrication Symposium

In a presentation titled “Optical Measurement of Functional Surface Structures Measured with Super Resolution”, GBS introduced a new method to enhance resolution in smartWLI measurements. In summary:

• The systems can be used to measure functional surfaces with a roughness (Ra) below 1 µm

• The algorithms used for data evaluation have a significant impact on the practically achieved lateral resolution

• Super resolution can improve measurement results even when the original measurement point density of the camera is already well below the optical resolution of the used objective

• Structured height, material, and geometry have a significant influence on the lateral resolution the system can achieve

• The DLIM parameter is a suitable tool for evaluating the lateral resolution of the system

Download the full presentation:

Optische Messung von Funktionsflächen mit Superauflösung