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Startseite - Products - smartWLI extended range

smartWLI extended range –
with a medium range z – stage

The sensor is the entry level model into the smartWLI product family. The integrated 5 mm axis can be used for automated fast focusing with range detection and automated measurements. This saves time and simplifies the sensor integration into production lines.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

optical 3d sensor	optical 3d sensor
objectives	single objective / manual exchangeable
objective magnifications	2.5x – 115X
tube magnification	0.5x
measuring principle	coherence scanning (white-light) interferometer
scanning device	5 mm z – stage
topography reproducibility	0.5 nm (single scan without profile averaging)
repeatability RMS	0.05 m single scan without profile averaging)
optional stands	manual and motorized stands
high speed camera	2.3 MP camera up to 3.2 kfps
point evaluation	massive parallel in real time on the GPGPUs
evaluation algorithms	VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry)

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Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.