smartWLI nanoscan –
sensor with extreme resolution
The smartWLI nanoscan is equipped with a higher tube magnification blue LED illumination and a 5 MP camera. This enables the sensor to measure structures with a lateral dimension down to app. 0.4 µm with a spatial sampling down to 0.03 µm.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI nanoscan as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.
| optischer 3D Sensor | optical 3d sensor |
| objectives | Coherence scanning (white light) interferometer |
| objective magnifications | Piezo-Positioniersystem mit kapazitivem Sensor und Positionsregelung |
| tube magnification | 2456 x 2054 pixels / 77 Hz and acceleration up to 2 kHz with limited number of measuring points |
| measuring principle | Massively parallel processing of image data in real time Use of programmable high-performance graphics cards |
| scanning device | Software libraries in C++ and C# with sample application and associated source code Control of all sensor functions |
| topography reproducibility | VSI (Vertical Scanning Interferometry), EPSI (Extended Phase Shift Interferometry) HD-EPSI (High Density – Extended Phase Shift Interferometry) with very small step sizes |
| repeatability RMS | Optional averaging of up to 40 individual measurements for noise reduction |
| optional stands | Variable step sizes for optimizing resolution and measurement speed |
| high speed camera | 5 MP camera up to 2 kfps |
| point evaluation | massive parallel in real time on the GPGPUs |
| evaluation algorithms | VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) / HD (high density extended phase shift interferometry) |
Application example
Materials for download
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Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.
