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GBScope – 3D-Profiler

with an excellent price performance ratio

 

The manual and optional motorized turret simplifies the operation of the fast optical profiler with a measuring volume of 100 x 100 x 50 mm³ (xyz) and optional configuration up to 300 x 300 x 100 mm³. The turret allows the easy localization of small features using low magnification objectives with instant exchange of the objective for measure-ments.
The system is an optimized solution for the measurement of any surfaces except super polished optical and semiconductor surfaces. It is ideal for measuring labs and research and development requiring data of the surface texture, roughness, and dimension of micro geometries.

optical 3d profiler optical 3d profiler with motorized xyz portal
objectives objective turret with up to 4 objectives
objective magnifications 5x – 115x
tube magnification 0.5x
measuring principle coherence scanning (white-light) interferometer
scanning device large range z – stage
topography reproducibility 0.5 nm (single scan without profile averaging)
repeatability RMS 0.05 nm (single scan without profile averaging)
measuring volume 100 x 100 x 50 mm' (xyz) / optional up to 300 x 300 x 100 mm* (xyz)
high speed camera 2.3 MP camera up to 3.2 kfps
point evaluation massive parallel in real time on the GPGPUs
evaluation algorithms VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry)

Materials for download

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