GBScanner –
3D profiler for fast and reliable roughness measurements
The smartWLI GBScanner is a fast optical profiler with sub nanometer topography reproducibility. By using a motorized 3-axis tripod for scanning and positioning with a measuring volume of 100 x 100 x 50 mm³ (xyz) an extension up to 300 x 300 x 100 mm², the system can be used for the measurement of medium seize samples. The 3d data will be evaluated in MountainsMap and allows automated push button scan and data evaluations using customized evaluation macros.
| optical 3d profiler | optical 3d profiler with motorized xyz portal |
| objectives | single objective / manual exchangeable |
| objective magnifications | 2.5x – 115x |
| tube magnification | 0.5x |
| measuring principle | coherence scanning (white-light) interferometer |
| scanning device | large range z – stage |
| topography reproducibility | 0.5 nm (single scan without profile averaging) |
| repeatability RMS | 0.05 nm (single scan without profile averaging) |
| measuring volume | 100 × 100 × 50 mm° (xyz) / optional up to 300 × 300 x 100 mm* (xyz) |
| high speed camera | 2.3 MP camera up to 3.2 kfps |
| point evaluation | massive parallel in real time on the GPGPUs |
| evaluation algorithms | VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) |
als for download
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