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Startseite - Products - smartWLI compact

smartWLI compact –
universal high-performance sensor

The sensor combines compact dimensions with an excellent resolution and an affordable price. Available with 2 different cameras and a single, manual exchangeable objective make the sensor a good choice for repeated measurements of similar samples and measuring tasks which require similar lateral resolutions.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI compact as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.

optical 3d sensor	optical 3d sensor
objectives	single objective / manual exchangeable
objective magnifications	2.5x – 115X
tube magnification	0.5x
measuring principle	coherence scanning (white-light) interferometer
scanning device	400 pm piezo stage with close loop capacity control
topography reproducibility	0.05 nm (single scan without profile averaging)
repeatability RMS	0.005 nm (single scan without profile averaging)
optional stands	manual and motorized stands
high speed camera	2.3 MP camera up to 3.2 kfps / 5 MP camera up to 2 kfps
point evaluation	massive parallel in real time on the GPGPUs
evaluation algorithms	VSI (vertical scanning interferometry) / EPSI (extended phase shift interferometry) / HD (high density extended phase shift interferometry)

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Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.