bool(false)

smartWLI next –
High-end-sensor with motorized objective turret

The smartWLI next combines the high resolution of a piezo scanner with the advantages of a motorized objective turret.
The sensor can be equipped with one of three different cameras, offering various speed and resolution options.

Various stands, granite gantries, vibration damping systems, and automated tilt stages allow the configuration of custom optical 3D profilers, with the smartWLI next serving as the key component for high-performance measurements.

The SDK, including C++ and C# libraries and source code for sample applications, enables easy integration of the sensor into high-end metrology systems for semiconductor and optics applications.

Optical 3D Sensor	High-performance sensor with motorized objective turret for up to 4 objectives
Measurement Principle	Coherence scanning (white-light) interferometer
Measurement Axis	Piezo positioning system with capacitive sensor and position control
High-Speed Camera	1280 × 1024 pixels / 935 Hz, with acceleration up to 10 kHz at reduced number of measurement points
Height Calculation	Massively parallel real-time processing of image data on GPGPUs (general-purpose graphics processing units / programmable high-performance GPUs)
SDK	Software libraries in C++ and C# with sample applications and accompanying source code Control of all sensor functions
Evaluation Algorithms	VSI (Vertical Scanning Interferometry)
Optional evaluation algorithms	HD-EPSI (High Density – Extended Phase-Shift Interferometry) with small sampling steps
Optional Profile Averaging	Averaging over up to 40 individual measurements for noise reduction
Scanning step sizes	Variable step sizes to optimize resolution and measurement speed

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Maximum measurement accuracy requires not only a powerful 3D surface sensor, but also optimally matched accessories. Our range of accessories has been specifically developed to fully exploit the performance of our systems and take your measurement results to a new level.