SpectroNet Collaboration Conference 2020

GBS presented a new method for achieving “Super Resolution” at the SpectroNet Collaboration Conference in September 2020

In a presentation titled “Super-Resolution for Coherence Scanning Interferometry Based on Advanced Image Processing Strategies”, GBS introduced a new approach to enhance resolution in smartWLI measurements. In summary:

Super-resolution improves measurement results:

• Increases point density

• Reduces noise

• Enhances profile fidelity

The systems can be used to measure structures with heights below 0.1 nm and achieve profile fidelity down to approx. 0.1 µm for structures smaller than 1 µm.
Processing on the GPGPU (General Purpose Graphics Processing Unit) enables real-time 3D computation with super-resolution.

Download the full presentation:

Superauflösung für die Interferometrie mit Kohärenzscanning basierend auf fortschrittlichen Bildverarbeitungsstrategien