Development of methods to improve measurement resolution

GBS metrology GmbH was founded in 1997. GBS develops, manufactures, and distributes surface measurement technology for the detection and evaluation of micro-geometries, surface structures, and roughness. Our product portfolio includes:

• Optical 3D sensors

• Optical 3D profilometers

• Gantry measuring devices and near-production measurement stations

Thanks to massively parallel image processing on high-performance GPGPUs (General Purpose Graphics Processing Units), extremely short measurement times can be achieved. This enables the use of our measuring devices and 3D sensors not only in laboratory settings but also in near-production environments and inline applications. The use of white-light interferometry (coherence scanning interferometry) allows for the measurement of a wide range of surfaces with extreme resolution.

GBS metrology GmbH is a manufacturer of optical 3D surface measuring devices, known as profilometers. Typically, a high-precision piezo actuator is used for vertical (Z-axis) adjustment in this type of metrology. However, by using mechanical axes (e.g., spindle drives), costs could be reduced and the range of applications for this technology expanded. Preliminary investigations have shown, however, that these mechanical axes exhibit several shortcomings that affect measurement results. As a result of these findings, GBS concluded that a software-based correction would be very complex and could only be solved in collaboration with INP.

The project was launched on February 1, 2025, and is funded by the State of Thuringia with financial support from the European Union.